Automated thin-film thickness mapping
F54- XY-200
1. Sample up to 200mm in diameter
2. Automated XY stage
3. Thin, thick, rough and opaque films
Thin-film thickness on samples up to 200mm by 200mm is easily mapped with the F54-XY-200 advanced spectral reflectance system. The motorized X-Y stage moves automatically to specified measurement locations, facilitating thickness measurements as quickly as two points per second.
- F50 Serie : Customizable thickness mapping - best cost/effective solution. More information >
- F54 Serie : Fine spot size - sample up to 450mm in diameter - R&D. More information >
- F60 Serie: High automation - notch detection - SECS / GEM interface. More information >
Applications
-
Semiconductor manufacturing
- Photoresist
- Oxides / Nitrides / SOI
- Wafer grinding
MEMS
- Photoresist
- Silicon membranes
- Dielectric stacks
LCD
- Cell gaps
- Polyimide
- ITO
Optical coatings
- Hardness coatings
- Anti-reflective coating
- Filters
More info on applications
- Dielectric
- Hard thickness
- IC failure analysis
- ITO and other TCO
- Medical equipement
- Metal thickness
- Microfluidics
- OLED
- Ophthalmic coatings
- Parylene Coatings
- Photoresist
- Porous silicon
- Treatment films
- Refractive index & k
- Wafers and membranes of silicon
- Solar applications
- Semiconductor teaching laboratories
- Roughness and surface finish
Thin-Film Mapping Analyzer Automated Thin-Film Thickness Mapping System
Choose one of the dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points.
The table-top instrument connects to the USB port of your Windows® computer, can be set up in minutes and can be used by anyone with basic computer skills.
The different models are distinguished primarily by thickness and wavelength range. Generally, shorter wavelengths (e.g. F54-XY-200-UV) are required for measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.
What’s Included
- Integrated spectrometer/light source unit
- FILMapper measurement software
- SiO2 on Si Thickness standard
- Integrated Silicon reflectance standard
- Vacuum pump
- Spare TH-1 lamp
ADVANTAGES
- Sample up to 200mm in diameter
- Automated XY stage
- Thin, thick, rough and opaque films
Accessories
NIST-traceable thickness standard
Specifications
Model Specifications
| Model | Thickness Range* | Wavelength Range |
|---|---|---|
| F54-XY-200 | 20nm - 45µm | 380-1050nm |
| F54-XY-200-UV | 4nm - 35µm | 190-1100nm |
| F54-XY-200-NIR | 100nm - 115µm | 950-1700nm |
| F54-XY-200-EXR | 20nm - 115µm | 380-1700nm |
| F54-XY-200-UVX | 4nm - 115µm | 190-1700nm |
*film stack dependent
Thickness Range*
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